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feat(ontology): add BGBM backside grinding and metallization modules - #26

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JeremyYao1999 wants to merge 2 commits into
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JeremyYao1999:add-bgbm-ontology
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JeremyYao1999 wants to merge 2 commits into
aitomatic:stablefrom
JeremyYao1999:add-bgbm-ontology

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PR: Add BGBM (Backside Grinding + Metallization) ontology modules

Summary

Adds two new semantic modules under ontology/ontology/06-osat-packaging-test/00-assembly-processes/:

  • 03-backside-grinding/ontology.ttl — wafer backside grinding (thinning) semantics
  • 04-backside-metallization/ontology.ttl — wafer backside metallization (BM) semantics

These fill a gap in the assembly-processes layer, which currently covers die-attach, encapsulation, and molding but is missing the wafer-preparation front-end steps (backside thinning and metallization) that precede dicing and bonding.

What's included

Backside grinding (03-backside-grinding)

Class Description
BacksideGrindingProcess In-feed wafer backside thinning process
RoughGrindingStep / FineGrindingStep Coarse vs fine grinding stages
TaikoGrindingProcess Edge-retained thinning variant for ultra-thin wafers
BacksideGrindingDefect Scratch, crack, silicon dust, surface damage, residual stress

Properties: hasTargetThickness, hasTotalThicknessVariation (TTV).

Backside metallization (04-backside-metallization)

Class Description
BacksideMetallizationProcess Metal deposition on the thinned backside
ElectronBeamEvaporationProcess E-beam evaporation deposition method
BacksideMetalStack Metal / multi-layer stack (Au, Ag, Al, Ti/Ni/Ag)
BacksideMetallizationDefect Metal peeling, poor adhesion

Properties: hasMetalStack.

Conventions followed

  • Turtle (.ttl) under the correct layer/subcategory, per ontology/ontology/README.md.
  • owl:versionInfo "0.1.0", prov:wasGeneratedBy curation activity, dc:source / dc:rights, and prov:generatedAtTime provenance on every term.
  • Classes subclass assembly_processes:AssemblyProcess (consistent with existing 00-die-attach) and reuse semicont-core:Defect / semicont-core:Material from 00-shared.
  • Industry-general knowledge only; no company-specific recipes or vendor differentiation.

Note for maintainers

The parent module 00-assembly-processes/ontology.ttl is still a placeholder (PlaceholderClass), while its child 00-die-attach already references assembly_processes:AssemblyProcess. Suggest promoting a real AssemblyProcess class into the parent module in a follow-up so all child modules share a consistent superclass.

This ontology module defines the semantics for wafer backside grinding processes, including various grinding steps and associated defects.
This ontology module defines the semantics for backside metallization processes in semiconductor manufacturing, including classes for processes, methods, materials, defects, and properties.
@JeremyYao1999 JeremyYao1999 closed this by deleting the head repository Aug 23, 2026
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