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feat(ontology): add BGBM backside grinding and metallization modules - #26
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JeremyYao1999 wants to merge 2 commits into
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This ontology module defines the semantics for wafer backside grinding processes, including various grinding steps and associated defects.
This ontology module defines the semantics for backside metallization processes in semiconductor manufacturing, including classes for processes, methods, materials, defects, and properties.
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PR: Add BGBM (Backside Grinding + Metallization) ontology modules
Summary
Adds two new semantic modules under
ontology/ontology/06-osat-packaging-test/00-assembly-processes/:03-backside-grinding/ontology.ttl— wafer backside grinding (thinning) semantics04-backside-metallization/ontology.ttl— wafer backside metallization (BM) semanticsThese fill a gap in the assembly-processes layer, which currently covers die-attach, encapsulation, and molding but is missing the wafer-preparation front-end steps (backside thinning and metallization) that precede dicing and bonding.
What's included
Backside grinding (
03-backside-grinding)BacksideGrindingProcessRoughGrindingStep/FineGrindingStepTaikoGrindingProcessBacksideGrindingDefectProperties:
hasTargetThickness,hasTotalThicknessVariation(TTV).Backside metallization (
04-backside-metallization)BacksideMetallizationProcessElectronBeamEvaporationProcessBacksideMetalStackBacksideMetallizationDefectProperties:
hasMetalStack.Conventions followed
.ttl) under the correct layer/subcategory, perontology/ontology/README.md.owl:versionInfo "0.1.0",prov:wasGeneratedBycuration activity,dc:source/dc:rights, andprov:generatedAtTimeprovenance on every term.assembly_processes:AssemblyProcess(consistent with existing00-die-attach) and reusesemicont-core:Defect/semicont-core:Materialfrom00-shared.Note for maintainers
The parent module
00-assembly-processes/ontology.ttlis still a placeholder (PlaceholderClass), while its child00-die-attachalready referencesassembly_processes:AssemblyProcess. Suggest promoting a realAssemblyProcessclass into the parent module in a follow-up so all child modules share a consistent superclass.