🇺🇸 English  |  🇨🇳 中文

MyEAP - Enterprise Equipment Automation Program

Enterprise-grade Equipment Automation Program for Semiconductor Manufacturing

---

Quick Start

git clone https://github.com/fzrai/myeap.git
cd myeap
uv sync
uv run pytest
uv run uvicorn myeap.api.main:app --reload

Architecture

┌─────────────────────────────────────────────────────────────────────────────┐
│                           Kubernetes Cluster                                │
├─────────────────────────────────────────────────────────────────────────────┤
│  ┌─────────────────────────────────────────────────────────────────┐       │
│  │                      MES Integration Layer                       │       │
│  │    ┌──────────┐   ┌──────────┐   ┌──────────┐                  │       │
│  │    │   MQTT   │   │   REST   │   │  Kafka   │                  │       │
│  │    │  Adapter │   │  Gateway │   │ Consumer │                  │       │
│  │    └──────────┘   └──────────┘   └──────────┘                  │       │
│  └─────────────────────────────────────────────────────────────────┘       │
│                                                                             │
│  ┌─────────────────────────────────────────────────────────────────┐       │
│  │                      Shared Services Layer                       │       │
│  │    ┌────────┐ ┌────────┐ ┌────────┐ ┌────────┐ ┌──────────┐  │       │
│  │    │ Recipe │ │ Alarm  │ │  Data  │ │ Track  │ │ SPC/FDC  │  │       │
│  │    │ Manager│ │ Handler│ │Collect │ │Service │ │  Engine  │  │       │
│  │    └────────┘ └────────┘ └────────┘ └────────┘ └──────────┘  │       │
│  └─────────────────────────────────────────────────────────────────┘       │
│                                                                             │
│  ┌─────────────────────────────────────────────────────────────────┐       │
│  │                      Device Control Layer                        │       │
│  │    ┌───────────┐   ┌───────────┐   ┌──────────────────┐        │       │
│  │    │ SECS/GEM  │   │ Equipment │   │    Process       │        │       │
│  │    │  Driver   │   │   State   │   │   Controller     │        │       │
│  │    └───────────┘   └───────────┘   └──────────────────┘        │       │
│  │                                                                       │       │
│  │    [Cleaner] [CVD] [PVD] [Etcher] [Lithography] [CMP] ...          │       │
│  └─────────────────────────────────────────────────────────────────┘       │
│                                                                             │
│  ┌─────────────────────────────────────────────────────────────────┐       │
│  │                          Data Layer                              │       │
│  │    ┌───────────┐ ┌───────────┐ ┌───────────┐ ┌─────────┐      │       │
│  │    │   Redis   │ │PostgreSQL │ │TimescaleDB│ │  MinIO  │      │       │
│  │    │  (Cache)  │ │ (Primary) │ │(Timeseries)│ │ (Recipe)│      │       │
│  │    └───────────┘ └───────────┘ └───────────┘ └─────────┘      │       │
│  └─────────────────────────────────────────────────────────────────┘       │
└─────────────────────────────────────────────────────────────────────────────┘

Features

SECS/GEM Protocol

• SECS-II message encoding/decoding
• HSMS connection management with heartbeat
• GEM state machine (SEMI E30)
• Standard message handling (S1-S15)
• Auto reconnection with exponential backoff

MES Integration

• MQTT adapter (pub/sub messaging)
• REST API gateway
• Kafka adapter (event streaming)
• Work order reception and status reporting
• Alarm and throughput reporting

Equipment Control

• Unified equipment abstraction
• Multi-chamber coordination
• Process flow control
• Plugin-based equipment support
• Cleaner, CVD, PVD, Etcher plugins

Recipe Management

• Version control (semantic versioning)
• Approval workflow
• Upload/download to equipment
• Recipe comparison
• Parameterized templates

Alarm Management

• Multi-level severity (CRITICAL/MAJOR/MINOR/WARNING)
• Multi-channel notifications (Email/SMS/Webhook)
• Auto-escalation
• Alarm suppression
• Statistics and analytics

Data Collection

• Real-time data collection
• Multiple sampling strategies (time, change, statistical, smart)
• Limit monitoring (UCL/LCL/USL/LSL)
• High-frequency process data

SPC/FDC Engine

• Control charts (X-bar, R, S, X-MR, C, U, P, NP, EWMA, CUSUM)
• 8 Westgard SPC rules
• Process capability (Cp, Cpk, Pp, Ppk, sigma level)
• Fault detection and classification
• Feature extraction and anomaly detection

Tracking & Traceability

• Carrier management (FOUP, FOSB)
• Wafer-level tracking
• Chamber mapping
• Forward/backward traceability
• Impact analysis

Observability

• Prometheus metrics
• OpenTelemetry distributed tracing
• Structured logging
• Liveness/readiness health checks

Security & Compliance

• OAuth2/LDAP authentication
• Role-based access control (RBAC)
• Audit trail
• Electronic signature (21 CFR Part 11)

Development Status

Module	Status	Tests
SECS/GEM Protocol	✅ Done	47+
MES Integration	✅ Done	81+
Device Control	✅ Done	75+
Recipe Management	✅ Done	105+
Alarm Management	✅ Done	71+
Data Collection	✅ Done	84+
Tracking Service	✅ Done	62+
SPC Engine	✅ Done	46+
FDC Engine	✅ Done	89+
Process Engine	🔄 WIP	-
AI/ML Module	🔄 WIP	-
Digital Twin	🔄 WIP	-

Tech Stack

Category	Technology
Language	Python 3.11+
Async Framework	asyncio, FastAPI, uvicorn
Protocol	pycomm3 (SECS/GEM/HSMS)
Messaging	Apache Kafka, MQTT
Database	PostgreSQL (Citus), Redis, TimescaleDB
Object Storage	MinIO (S3-compatible)
Container	Docker, Kubernetes
Monitoring	Prometheus, Grafana, Jaeger
AI/ML	PyTorch, scikit-learn
Security	OAuth2, JWT

Project Structure

myeap/
├── src/myeap/
│   ├── core/          # Core infrastructure
│   ├── observability/  # Observability
│   ├── db/            # Database
│   ├── secs/          # SECS/GEM protocol
│   ├── mes/           # MES integration
│   ├── device/        # Equipment control
│   ├── recipe/        # Recipe management
│   ├── alarm/         # Alarm management
│   ├── tracking/      # Tracking service
│   ├── data/          # Data collection
│   ├── spc/           # SPC engine
│   ├── fdc/           # FDC engine
│   ├── ai/            # AI/ML module
│   ├── twin/          # Digital twin
│   ├── security/      # Security
│   └── api/           # REST API
├── tests/             # Tests
├── configs/           # Config files
├── docs/              # Documentation
└── alembic/           # DB migrations

Documentation

• 📖 English Full Documentation
• 📖 完整中文文档
• 📋 API Reference
• 🏗️ Architecture Design

Development

# Format code
uv run black .

# Lint
uv run ruff check .

# Type check
uv run mypy src/

# Run tests
uv run pytest

# With coverage
uv run pytest --cov=myeap --cov-report=html

Contributing

1. Fork this repository
2. Create your feature branch (git checkout -b feature/AmazingFeature)
3. Commit your changes (git commit -m 'feat: Add AmazingFeature')
4. Push to the branch (git push origin feature/AmazingFeature)
5. Create a Pull Request

License

MIT License - see LICENSE

---

Made for Semiconductor Manufacturing