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    5 repositories

    • OpenFuILT-Eval

      Public
      Evaluation Framework for Full-chip Scale OPC
      Python
      •
      Apache License 2.0
      •6•9•0•0•Updated Dec 27, 2025Dec 27, 2025

    • TorchLitho-2.0

      Public
      [ASICON'25] User-friendly lithography simulation engine for full-chip scale mask optimization
      Python
      •
      Apache License 2.0
      •12•56•0•0•Updated Dec 17, 2025Dec 17, 2025

    • OpenFuILT

      Public
      [ISPD'24] FuILT: Full Chip ILT System With Boundary Healing
      Python
      •
      Apache License 2.0
      •6•26•0•0•Updated Nov 4, 2025Nov 4, 2025

    • Adaptive-Boxes

      Public
      Python
      •
      MIT License
      •2•1•0•0•Updated Oct 18, 2025Oct 18, 2025

    • OpenILT

      Public
      An Open-source Platform for Inverse Lithography Technology Research
      Python
      •
      MIT License
      •57•248•8•0•Updated Apr 16, 2025Apr 16, 2025
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